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which includes:
This includes additional documentation recommended to support equipment installations but not directly related to EPOC’s
the Standard does not specify how this actuation will take place
2 This Specification applies to all semiconductor manufacturing equipment that supports the data acquisition interface defined in the SEMI Specification for Data Collection Management
E14800 - SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object Revision:SEMI E148-0309E - Superseded which includes:The purpose of this Standard is to define the requirements for any factory component computer clock that requires synchronization of time to maintain and manage date time accurately and consistently by using a common time synchronization protocol. This Standard defines the TS Clock object for accessing factory application and equipment time value and synchronization status, describes an example of network time synchronization architecture, and
